BS PD IEC TR 63258:2021

Nanotechnologies. A guideline for ellipsometry application to evaluate the thickness of nanoscale films

BSI Group , 03/25/2021

Publisher: BS

File Format: PDF

$132.00$264.16

Description

Standard By:BSI Group , 03/25/2021

Published:03/25/2021

Pages:24

ISBN(s):9780539057102

File Size:1 file , 1.1 MB

Language:English

Note:This product is unavailable in Ukraine, Russia, Belarus

This document, which is a Technical Report, is focused on the practical protocol of ellipsometryto evaluate the thickness of nanoscale films. This document does not include any specificationof the ellipsometers, but suggests how to minimize the data variation to improve datareproducibility.

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