DIN 50450-2

Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of oxygen impurity in N<(Index)2>, Ar, He, Ne and H<(Index)2> by using a galvanic cell

Deutsches Institut Fur Normung E.V. (German National Standard) , 03/01/1991

Publisher: DIN

File Format: PDF