DIN 50451-2

Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spectroscopy

Deutsches Institut Fur Normung E.V. (German National Standard) , 04/01/2003

Publisher: DIN

File Format: PDF

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Standard By:Deutsches Institut Fur Normung E.V. (German National Standard) , 04/01/2003

Published:04/01/2003

Pages:4

File Size:1 file , 39 KB

Language:German

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