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IEC 62047-34 Ed. 1.0 en:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

International Electrotechnical Commission , 04/05/2019

Publisher: IEC

File Format: PDF

$47.00$95.00


Standard By:International Electrotechnical Commission , 04/05/2019
Published:04/05/2019
Pages:16
File Size:1 file , 1.2 MB
Language:English
Note:This product is unavailable in Ukraine, Russia, Belarus
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

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