IEST RP-CC028.1

Minienvironments

Institute of Environmental Sciences and Technology , 05/01/2002

Publisher: IEST

File Format: PDF

$123.00$247.00

Description

Standard By:Institute of Environmental Sciences and Technology , 05/01/2002

Published:05/01/2002

Language:English

IEST RP-CC028.1 provides a framework for describing minienvironments for microelectronics and similar applications. It is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.

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