JIS K 0148:2005

Surface chemical analysis -- Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

Japanese Industrial Standard / Japanese Standards Association , 01/01/2005

Publisher: JIS

File Format: PDF

$37.00$75.00

Standard By:Japanese Industrial Standard / Japanese Standards Association , 01/01/2005

Published:01/01/2005

Language:English

$16.00 $32.00

$21.00 $43.00

$10.00 $21.00

$16.00 $32.00